PECVD deposition machine / thermal evaporation / sputtering
12 - 22 min | COMBIMET
INO Group
![PECVD deposition machine / thermal evaporation / sputtering](http://ino.vn/uploads/product/73568-7907435.jpg)
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Method:
PECVD
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Technology:
thermal evaporation, sputtering
Chamber Vertical
Coating technology
Thermal evaporation and sputtering
Glow discharge/etching
ECVD base coat
PECVD top coat
NOS
SiOx
Medium Frequency
Polycold trap in chamber
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